Title:
真空乾燥装置における乾燥終点の確認方法
Document Type and Number:
Japanese Patent JP5094372
Kind Code:
B2
Inventors:
Takashi Hanamoto
Katsuhiko Ito
Takao Kinoshita
Kaoru Ito
Katsuhiko Ito
Takao Kinoshita
Kaoru Ito
Application Number:
JP2007333985A
Publication Date:
December 12, 2012
Filing Date:
December 26, 2007
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F26B25/00; F26B5/04; F26B5/06
Domestic Patent References:
| JP2005214599A | ||||
| JP2004232965A | ||||
| JP8121956A | ||||
| JP5272867A | ||||
| JP63185093U |
Attorney, Agent or Firm:
Hideki Abe
Shigeo Ishijima
Shigeo Ishijima