Title:
ガス分解システムおよびガス分解器の寿命確認方法
Document Type and Number:
Japanese Patent JP5815089
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas decomposition system which minimizes the possibility that a gas to be decomposed is discharged without being decomposed and uses the ability of a gas decomposer close to the utmost limit thereby extending its life.SOLUTION: A gas decomposition system 40 includes: an ozone killer 41 which is provided at an exhaust pipeline 31 for exhausting an ozone gas from a chamber 11 to which the ozone gas is supplied and decomposes the ozone gas; a branch pipeline 42 which is branched from a mid part of the ozone killer 41 and is connected with the exhaust pipeline 31; an ozone sensor 43 which is provided at the branch pipeline 42 and detects a concentration of the ozone gas; a monitor section 51a which monitors the concentration of the ozone gas detected by the ozone sensor 43; and a flow control valve 44 which is provided at the downstream side of the ozone sensor 43 in the branch pipeline 42, which is located near a connection part with the exhaust pipeline 31, and controls a flow rate of an exhaust gas. The gas decomposition system 40 determines the life of the ozone killer 41 from the concentration of the ozone gas that is monitored.
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Inventors:
Takehiro Shindo
Masaki Kondo
Masaki Kondo
Application Number:
JP2014133931A
Publication Date:
November 17, 2015
Filing Date:
June 30, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B01D53/66; B01D53/34; C01B13/10; H01L21/3065
Domestic Patent References:
| JP5601796B2 | ||||
| JP11070321A | ||||
| JP63157423A | ||||
| JP2008241384A | ||||
| JP2001141880A | ||||
| JP8024552A | ||||
| JP2008302348A | ||||
| JP2010131564A |
Attorney, Agent or Firm:
Hiroshi Takayama