Title:
PZT膜のクリーニング方法
Document Type and Number:
Japanese Patent JP4313144
Kind Code:
B2
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Inventors:
Kenji Tanaka
Isamu Mouri
Isamu Mouri
Application Number:
JP2003347801A
Publication Date:
August 12, 2009
Filing Date:
October 07, 2003
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C09K13/06; H01L21/31; C09K13/08; C23C16/44; H01L21/3065
Domestic Patent References:
| JP2001284330A | ||||
| JP2001176807A |
Attorney, Agent or Firm:
Yoshiaki Hanada