Title:
基板処理装置、基板移動方法、基板搬送装置、及び基板処理モジュールの清掃方法
Document Type and Number:
Japanese Patent JP5483556
Kind Code:
B2
Abstract:
A substrate processing apparatus having a plurality of substrate processing modules connected to a substrate transport. The substrate transport has a housing and a substrate transport mechanism. The housing forms a substantially closed main transport chamber with doorways into the main transport chamber for the substrate processing modules. The transport mechanism has a substrate holder movably located in the transport chamber. The housing includes a front end extension that is connected to load locks. The front end extension has an aligner, a cooler, and a buffer directly connected to the housing and located in the front end extension in part of the main transport chamber.
Inventors:
Beaulieu David Earl.
Pippins Michael W.
Pippins Michael W.
Application Number:
JP2010019644A
Publication Date:
May 07, 2014
Filing Date:
January 29, 2010
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
H01L21/677; B65G49/07; C23C14/50; C23C14/56; C23C16/44; H01L21/00; H01L21/02; H01L21/205
Domestic Patent References:
| JP7122619A | ||||
| JP2094647A | ||||
| JP6140492A | ||||
| JP7029958A | ||||
| JP4620863B2 | ||||
| JP8046013A | ||||
| JP5304197A | ||||
| JP7288275A | ||||
| JP5275519A |
Attorney, Agent or Firm:
Motohiko Fujimura
Shigeyuki Nagaoka
Shigeyuki Nagaoka