Title:
合成樹脂製収納ケースの洗浄方法
Document Type and Number:
Japanese Patent JP3576216
Kind Code:
B2
Inventors:
Shigeyoshi Narazu
Yasuyuki Harada
Yasuyuki Harada
Application Number:
JP19245394A
Publication Date:
October 13, 2004
Filing Date:
August 16, 1994
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
Pretec Co., Ltd.
Pretec Co., Ltd.
International Classes:
B08B7/00; B65D85/86; C08J7/00; C08J7/02; H01L21/67; H01L21/68; (IPC1-7): C08J7/00; C08J7/02; H01L21/68
Domestic Patent References:
| JP4309532A | ||||
| JP63161636A | ||||
| JP6298970A | ||||
| JP4285638A | ||||
| JP4266938A | ||||
| JP3081945U | ||||
| JP5178381A |
Foreign References:
| WO1994014191A1 |
Attorney, Agent or Firm:
Kanji Arai