Title:
How to conduct surface inspection
Document Type and Number:
Japanese Patent JP5980822
Kind Code:
B2
Abstract:
An inspection tool includes an illumination element for directing light beams onto a workpiece at differing wavelengths or at differing angles of incidence or combinations thereof. Such beams producing reflected light and scattered light optical signals. A scanning element and optical detector elements are provided. The optical detector elements receive reflected light signals and scattered light signals. Circuitry for receiving the reflected light signals and scattered light signals are used to determine thickness values for partially transmissive layers formed on the workpiece and correct for the effects of the thickness of the partially transmissive layer so that said signals can be used to identify and characterize defects of the workpiece. Moreover, the invention includes descriptions of methods for accomplishing such inspections.
Inventors:
David W. Short
Application Number:
JP2014010017A
Publication Date:
August 31, 2016
Filing Date:
January 23, 2014
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G01N21/956; G01B11/06; G01B11/30; H01L21/66
Domestic Patent References:
| JP7201942A | ||||
| JP2003166947A | ||||
| JP2001281162A | ||||
| JP8255751A | ||||
| JP2002334913A |
Foreign References:
| US5416594 |
Attorney, Agent or Firm:
Meisei International Patent Office
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