Title:
ゲート電圧制御システムおよび微小電子機械デバイスを静電作動させる方法
Document Type and Number:
Japanese Patent JP5172360
Kind Code:
B2
Abstract:
A gating voltage control system is provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch (14). The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit (10) electrically coupled to a gate terminal (16) of the device to apply a gating voltage. The gating voltage control system may further comprise a controller (12) electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval (T1) for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval (T2) for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.
More Like This:
Inventors:
Joshua Isaac Wright
Kanaka Sabapati Subramanian
William James Premarani
John Norton Park
Christopher Kaimel
Ron Ke
Kuna Venkat Satya Lama Kishore
Abizite Decal Sate
Shufen Wang
Edward Keith Howell
Kanaka Sabapati Subramanian
William James Premarani
John Norton Park
Christopher Kaimel
Ron Ke
Kuna Venkat Satya Lama Kishore
Abizite Decal Sate
Shufen Wang
Edward Keith Howell
Application Number:
JP2008002778A
Publication Date:
March 27, 2013
Filing Date:
January 10, 2008
Export Citation:
Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
H01H59/00; B81B3/00; B81B7/02; H01H47/00
Domestic Patent References:
| JP2005536854A | ||||
| JP2005536013A |
Attorney, Agent or Firm:
Arakawa Satoshi
Hirokazu Ogura
Toshihisa Kurokawa
Hirokazu Ogura
Toshihisa Kurokawa