Title:
真空機器内の状態情報を求める方法
Document Type and Number:
Japanese Patent JP7096287
Kind Code:
B2
Abstract:
To provide a method for easily and reliably acquiring state information in a vacuum apparatus having a gas flow unit in order to control and/or to supply a gas flow.SOLUTION: This invention relates to a method for acquiring state information in a vacuum apparatus having a gas flow unit for controlling and/or supplying a gas flow. The method has the following steps for: (a) measuring a first temperature measurement value in a gas flow region by using a temperature sensor in a first operation state of the gas flow unit; (b) transiting the gas flow unit to a second operation state which is different from the first operation state; (c) measuring a second temperature measurement value in the gas flow region; (d) acquiring a measurement deviation of the second temperature measurement value from the first temperature measurement value; (e) comparing the measurement deviation and a prediction deviation; and (f) acquiring the state information on the basis of the comparison.SELECTED DRAWING: Figure 1
Inventors:
Christian Koch
Michael Schweighoefer
Michael Schweighoefer
Application Number:
JP2020095219A
Publication Date:
July 05, 2022
Filing Date:
June 01, 2020
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04D19/04; F04B37/16
Domestic Patent References:
| JP2005009337A | ||||
| JP2019529949A | ||||
| JP2019052635A | ||||
| JP2006037739A |
Foreign References:
| EP3557073A1 |
Attorney, Agent or Firm:
Esaki Mitsufumi
Blacksmith Minoru Sawa
Shinsuke Nakamura
Blacksmith Minoru Sawa
Shinsuke Nakamura