Title:
被加工物ユニットの保持方法
Document Type and Number:
Japanese Patent JP7152882
Kind Code:
B2
Abstract:
To eliminate the need for device area exceeding the diameter of an annular frame like a clamp type, when holding a workpiece unit.SOLUTION: In a mechanism 3 for holding a unit WU including an annular frame F for supporting a workpiece W via a tape T by holding table means 3A consisting of a holding table 30 and a frame holding part 31 surrounding the holding table 30, a bolt-like engaging projection 310 is formed in the frame holding part 31, a hole Fe into which a head 310a of the engaging projection 310 is inserted, and a slot Fg elongating from the insertion hole Fe in the hoop direction and engaging with a neck 310b of the engaging projection 310 are formed in the frame F. In the mechanism 3, by relative rotation of the unit WU and the holding table means 3A, the engaging projection 310 comes and goes between the position where the engaging projection 310 is inserted into the insertion hole Fe, and the position where the neck 310b of the engaging projection 310 engages with the slot Fg, and the unit WU can be held by the holding table means 3A, when the engaging projection 310 is at the engaging position.SELECTED DRAWING: Figure 6
Inventors:
Hideo Iwata
Application Number:
JP2018107596A
Publication Date:
October 13, 2022
Filing Date:
June 05, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683; H01L21/301; H01L21/304
Domestic Patent References:
| JP2006114598A | ||||
| JP11214487A | ||||
| JP11307488A | ||||
| JP2014113673A | ||||
| JP2017143179A |
Foreign References:
| US7955041 | ||||
| KR101328411B1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office