Title:
表示装置の作製方法
Document Type and Number:
Japanese Patent JP6823745
Kind Code:
B2
Abstract:
A glass substrate is reused. The mass productivity of a semiconductor device is increased. A glass substrate one surface of which includes a first material and a second material. The first material includes one or both of a metal and a metal oxide. The second material includes one or both of a resin and a decomposition product of a resin. A cleaning method of a glass substrate, which includes a step of preparing the glass substrate one surface of which includes a first material and a second material and a step of exposing the first material by removing at least part of the second material.
Inventors:
Shunpei Yamazaki
Masataka Sato
Satoru Idojiri
Natsuko Takase
Masataka Sato
Satoru Idojiri
Natsuko Takase
Application Number:
JP2020080626A
Publication Date:
February 03, 2021
Filing Date:
April 30, 2020
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/02; G09F9/00; H01L21/304; H01L21/336; H01L27/32; H01L29/786; H01L51/50; H05B33/02; H05B33/10
Domestic Patent References:
| JP2004349543A | ||||
| JP2015187701A | ||||
| JP2003163337A |