Title:
発光装置の作製方法
Document Type and Number:
Japanese Patent JP4597421
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a technique for manufacturing a self-light emitting device by a method of forming a thin film having high uniformity of film thickness distribution in a high throughput. SOLUTION: This method comprises sealing a low molecular organic electroluminescence material in a vapor cell having an orifice-like evaporated material blowout port, heating the low molecular organic electroluminescence material in an inert gas atmosphere, and forming a luminescent layer consisting of the low molecular organic electroluminescence material on a substrate.
Inventors:
Yasuyuki Arai
Application Number:
JP2001142465A
Publication Date:
December 15, 2010
Filing Date:
May 11, 2001
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H05B33/10; C23C14/12; H01L51/50; H05B33/12; H05B33/14
Domestic Patent References:
| JP8031741A | ||||
| JP10195639A | ||||
| JP2001523768A | ||||
| JP7138760A | ||||
| JP9184070A | ||||
| JP4221073A |
Foreign References:
| WO1999025894A1 | ||||
| US5554220 |