Title:
薄膜の作製方法
Document Type and Number:
Japanese Patent JP5411765
Kind Code:
B2
Abstract:
A novel method of forming a thin film is disclosed. The method comprises spraying a spray liquid prepared by dissolving and/or dispersing a solute in a solvent to form liquid droplets; concentrating the liquid droplets by vaporizing the solvent contained therein; and depositing the concentrated liquid droplets on a substrate or a layer formed on the substrate. In the method, liquid droplets having solid content concentration C2 are deposited after liquid droplets having solid content concentration C1 are deposited, provided that C1>C2 is satisfied.
Inventors:
Kazuhiro Oki
Hirotoshi Ando
Hirotoshi Ando
Application Number:
JP2010068561A
Publication Date:
February 12, 2014
Filing Date:
March 24, 2010
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
B05D1/02; B05D1/36; H01L51/50; H05B33/10
Domestic Patent References:
| JP2004329996A | ||||
| JP56051270A | ||||
| JP2010045221A | ||||
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| JP59179533A | ||||
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Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes