Title:
Ｍｏ−Ｓｉ−Ｂ層およびそれを製造する方法
Document Type and Number:
Japanese Patent JP2017524805
Kind Code:
A
Abstract:
本発明は、Ｍｏ１−ｘ−ｙＳｉｘＢｙ層で被覆された基板であって、当該層がＴ２相を含む基板、およびそれを製造する方法に関する。
Inventors:
Lachbauer, Richard
Arnz, Miriam
Milehofer, Paul Heinz
Poltsik, Peter
Phoebek, Annika
Crow, Izzy
Riedle, Helmut
Arnz, Miriam
Milehofer, Paul Heinz
Poltsik, Peter
Phoebek, Annika
Crow, Izzy
Riedle, Helmut
Application Number:
JP2016569676A
Publication Date:
August 31, 2017
Filing Date:
May 26, 2015
Export Citation:
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON
International Classes:
C23C14/06; B21D37/01; C22C27/04; C23C14/58
Domestic Patent References:
| JPH0867976A | 1996-03-12 | |||
| JP2004231988A | 2004-08-19 |
Foreign References:
| WO2013089177A1 | 2013-06-20 |
Other References:
A.LANGE ET AL.: "Oxidation behavior of magnetron sputtered double layer coatings containing molybdenum, silicon and b", INTERMETALLICS, vol. 48, JPN6019004286, 1 October 2013 (2013-10-01), pages 19 - 27, XP028668030, ISSN: 0004353042, DOI: 10.1016/j.intermet.2013.09.007
Attorney, Agent or Firm:
Fukami patent office