Title:
加速度センサの製造方法
Document Type and Number:
Japanese Patent JP5143857
Kind Code:
B2
Inventors:
Teruya Fukaura
Shinichiro Kazuki
Yutaka Katahara
Seiji Shibata
Shinichiro Kazuki
Yutaka Katahara
Seiji Shibata
Application Number:
JP2010096719A
Publication Date:
February 13, 2013
Filing Date:
April 20, 2010
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
| JP2006226743A | ||||
| JP10090299A | ||||
| JP6138141A | ||||
| JP7318583A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita