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Title:
How to manufacture an electronic devide including crevice termination structure and crevice termination structure
Document Type and Number:
Japanese Patent JP5990255
Kind Code:
B2
Abstract:
An electronic device includes a drift region, a Schottky contact on a surface of the drift region, and an edge termination structure in the drift region adjacent the Schottky contact. The edge termination structure includes a recessed region that is recessed from the surface of the drift region by a distance d that may be about 0.5 microns.

Inventors:
Chan Chinchun
Henning Jason
Application Number:
JP2014503928A
Publication Date:
September 07, 2016
Filing Date:
April 04, 2012
Export Citation:
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Assignee:
CREE INC.
International Classes:
H01L29/47; H01L21/329; H01L29/06; H01L29/12; H01L29/78; H01L29/872
Domestic Patent References:
JP2009177028A
JP2006516815A
JP2011096757A
JP2013545296A
JP2012191038A
JP2007258742A
JP2009302091A
JP2012004312A
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo