How to manufacture a thin film which consists of a nano sheet single layer film with a spin coat method, super-hydrophilicity-ized material by it, a substrate for oxide thin films, and dielectric material

Title:

Document Type and Number:

Japanese Patent JP5984089

Kind Code:

B2

Abstract:

To provide a method for producing a thin film consisting of nanosheet monolayer film(s) and use of the thin film obtained thereby. The method for producing a thin film consisting of nanosheet monolayer film(s) by a spin coat method according to the invention comprises a step for preparing an organic solvent sol formed by allowing nanosheets obtained by the exfoliation of an inorganic layered compound to be dispersed in an organic solvent; and a step for dropping the organic solvent sol onto a substrate and rotating the substrate using a spin coater. Preferably, the nanosheet size, the organic solvent sol concentration and the spin coater rotation speed are controlled.

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Inventors:

Takayoshi Sasaki
Kazuko Saruwatari
Kazuaki Matsuba
Akatsuka
Ebina Yasuo
Minoru Nagata

Application Number:

JP2012177153A

Publication Date:

September 06, 2016

Filing Date:

August 09, 2012

Export Citation:

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Assignee:

National Institute for Materials Science

International Classes:

C01G33/00; C01G23/04

Domestic Patent References:

JP2007031189A
JP2011184274A

Foreign References:

WO2008096866A1

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