Title:
真空隔膜セルを製造する方法
Document Type and Number:
Japanese Patent JP5196681
Kind Code:
B2
Abstract:
Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 μm to 30 μm. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.
Inventors:
Bertsch, Dietmar
Dietrich, Claus
Onda, Nico
Bust, martin
Dietrich, Claus
Onda, Nico
Bust, martin
Application Number:
JP2010501347A
Publication Date:
May 15, 2013
Filing Date:
March 25, 2008
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01L21/00
Domestic Patent References:
JP2002500352A | ||||
JP2002111011A | ||||
JP10114581A | ||||
JP2005156410A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Previous Patent: JPS5196680
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