Title:
焦電型温度センサを用いて温度を測定する方法
Document Type and Number:
Japanese Patent JP4833382
Kind Code:
B2
Abstract:
A temperature sensor includes first and second lower electrodes, a ferroelectric layer having polarization, a semiconductor layer; and first to third upper electrodes. The second upper electrode is interposed between the first upper electrode and the third upper electrode in a plan view. The semiconductor layer includes a first channel disposed between the first upper electrode and the second upper electrode, and a second channel disposed between the second upper electrode and the third upper electrode. The ferroelectric layer includes a first ferroelectric part disposed below the first channel and a second ferroelectric part disposed below the second channel. A polarization direction of the first ferroelectric part is opposite to a polarization direction of the second first ferroelectric part. The temperature is calculated based on the output voltage from the second upper electrode and the voltage applied to the first upper electrode.
Inventors:
Michito Ueda
Hiroyuki Tanaka
Yukihiro Kaneko
Eiji Fujii
Hiroyuki Tanaka
Yukihiro Kaneko
Eiji Fujii
Application Number:
JP2011523109A
Publication Date:
December 07, 2011
Filing Date:
February 17, 2011
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01K7/00; H01L37/02
Domestic Patent References:
| JPH02137268A | 1990-05-25 | |||
| JP2006203009A | 2006-08-03 | |||
| JPH10318849A | 1998-12-04 | |||
| JPS5911841B2 | 1984-03-19 |
Attorney, Agent or Firm:
Seiji Okuda
Osamu Kita
Hidetaka Okabe
Akiko Miyake
Misato Yamaguchi
Osamu Kita
Hidetaka Okabe
Akiko Miyake
Misato Yamaguchi