Title:
真空ポンプ排出システム及び真空ポンプ排出装置の作動方法
Document Type and Number:
Japanese Patent JP4567462
Kind Code:
B2
Abstract:
A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising a turbomolecular pumping mechanism; and a backing pumping mechanism. The drive shaft drives said molecular pumping mechanism and said backing pumping mechanism. The system also comprises an evacuation mechanism, such as a load lock pump, for evacuating at least, said turbomolecular pumping mechanism.
Inventors:
Scofield Nigel Paul
Application Number:
JP2004559876A
Publication Date:
October 20, 2010
Filing Date:
December 09, 2003
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04D19/04; F04B37/16; F04D27/00; F04D27/02
Domestic Patent References:
| JP11351190A | ||||
| JP11230086A | ||||
| JP2001020860A | ||||
| JP2000038999A |
Foreign References:
| EP1234982A1 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato