Title:
光学装置及び反射要素を方向付ける方法
Document Type and Number:
Japanese Patent JP5646632
Kind Code:
B2
Abstract:
An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.
Inventors:
ブイス、エドウィン
デ ブリース、ゴッセ
ボーン、フィデルス
デ ブリース、ゴッセ
ボーン、フィデルス
Application Number:
JP2012525944A
Publication Date:
December 24, 2014
Filing Date:
April 09, 2010
Export Citation:
Assignee:
エーエスエムエル ネザーランズ ビー．ブイ．
International Classes:
H01L21/027; G02B7/182; G02B7/198; G02B17/08; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Sakaki Morishita