Title:
光学面を研磨する方法及び光学素子
Document Type and Number:
Japanese Patent JP7053925
Kind Code:
B2
Abstract:
The invention relates to an optical element (10), comprising: a substrate (1) with an optical surface (2) embodied as a freeform surface and an area (3) adjoining the optical surface (2) at the side, wherein the area (3) adjoining the optical surface (2) at the side does not exceed a threshold of a polishing criterion in the form of a local astigmatism at every point (P), wherein the threshold is given by Δzs = (kmax – kmin)/8 D2, where kmin denotes a minimum local curvature and kmax denotes a maximum local curvature at a respective point (P) of the area (3) and where D2 = 2500 mm2, preferably D2 = 900 mm2, in particular D2 = 100 mm2 applies. The invention also relates to a method for polishing an optical surface (2) by means of a polishing tool, comprising: polishing the optical surface (2) embodied as a freeform surface by moving a polishing face of the polishing tool over the optical surface (2) and over an area (3) adjoining the optical surface (2) at the side, wherein the geometry of the area (3) is matched to the polishing tool, in particular to the geometry of the polishing face of the polishing tool, in such a way that a threshold of a polishing criterion is not exceeded at every point (P) of the area (3), wherein the polishing criterion (Δz) constitutes a measure for a polishing error at the optical surface (2) which is produced by moving the polishing tool over the area (3) adjoining the optical surface (2).
Inventors:
Jürgen Hoffmann
Robert Fical
Franz-Joseph Stickel
Manfred Matena
Mark Seitner
Robert Fical
Franz-Joseph Stickel
Manfred Matena
Mark Seitner
Application Number:
JP2021068492A
Publication Date:
April 12, 2022
Filing Date:
April 14, 2021
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
B24B13/04; G02B5/08; G02B5/26; G02B5/28
Domestic Patent References:
| JP2001322063A | ||||
| JP63221954A | ||||
| JP9239653A | ||||
| JP2009271454A | ||||
| JP2011041997A | ||||
| JP2004264365A |
Foreign References:
| US7118449 | ||||
| WO2010052316A1 | ||||
| KR1020100066756A |
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Daisuke Hashimoto
Mitsutsugu Sugimura
Daisuke Hashimoto