Title:
データ事前設定の方法。
Document Type and Number:
Japanese Patent JP2007516497
Kind Code:
A
Abstract:
A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.
Inventors:
Willis, James E.
Satoshi Harada
Hume, Edward Sea. The Third
Crekotka, James E.
Satoshi Harada
Hume, Edward Sea. The Third
Crekotka, James E.
Application Number:
JP2006532961A
Publication Date:
June 21, 2007
Filing Date:
May 11, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G05B23/02; G05B9/02; G05B9/03; G05B11/01; G05B19/00; G05B19/418
Domestic Patent References:
| JPH08286735A | 1996-11-01 |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama