Title:
ゲートバルブ装置、処理システム及びシール部材の交換方法
Document Type and Number:
Japanese Patent JP4010314
Kind Code:
B2
Abstract:
To provide a gate valve device for allowing the replacement of a seal member without opening a carriage chamber to the atmospheric air. The gate valve device 12 is mounted in the carriage opening of a treatment chamber 4 for opening/closing a space between the side of the carriage chamber 6 in a vacuum condition and itself. It comprises a valve element 44 to be seated for opening/closing the carriage opening, the seal member 66 detachably provided on the surface of the valve element for contacting the peripheral seated face of the carriage opening with air tightness, a maintenance seal member 68 provided on the outer periphery of the seal member to encircle the seal member at a preset space, a maintenance opening 72 provided in a casing and formed large enough for the maintenance seal member to seal the seal member being exposed with air tightness when seating the valve element, a maintenance opening/closing cover 74 for detachably blocking the maintenance opening at its outside with air tightness, and a valve element drive mechanism 46 for moving the valve element between the carriage
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Inventors:
Tsutomu Hiroki
Application Number:
JP2004366470A
Publication Date:
November 21, 2007
Filing Date:
December 17, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F16K51/02; F16K1/24; F16K3/00; F16K3/02; F16K3/18
Domestic Patent References:
| JP62199567U | ||||
| JP6059466U | ||||
| JP60013960U | ||||
| JP6040530U | ||||
| JP5306779A |
Attorney, Agent or Firm:
Akihiro Asai