挿抜機構及びブロック部材の交換方法 - 東京エレクトロン株式会社

Title:

挿抜機構及びブロック部材の交換方法

Document Type and Number:

Japanese Patent JP7076360

Kind Code:

B2

Abstract:

There is provided an insertion/extraction mechanism for having one or multiple block members being inserted into or extracted from a frame member forming an intermediate connection member that is disposed between a first member having multiple first members and a second member having multiple second terminals and electrically connects the first terminals and the second terminals, the block member having multiple connection terminals for electrically connecting the first terminals and the second terminals. The insertion/extraction mechanism comprises a first engaging unit and a second engaging unit that are engaged with a first engaged portion and a second engaged portion of the block member, respectively, thereby holding the block member.

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Inventors:

Hiroaki Sakamoto
Masanori Ueda
Jun Fujiwara

Application Number:

JP2018214146A

Publication Date:

May 27, 2022

Filing Date:

November 14, 2018

Export Citation:

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Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/66; G01R31/28

Domestic Patent References:

JP2001124833A
JP2016181601A
JP2014179379A
JP5183026A
JP11111791A
JP735777A

Attorney, Agent or Firm:

Tadashige Ito
Tadahiko Ito

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