To supply uniform gas to all unit humidifiers to be stacked in a short time in a transient operation state such as starting, stop, and load change, and suppress variation of humidifying rate or a flow rate caused by stable operation change and change over action.
A projection part 9a projecting a part of an inner wall to the inside of a manifold 5 is installed in the manifold 5, and by the projection part 9a, the manifold 5 is divided into a supply/exhaust piping side 5a and a separator gas passage inlet outlet side 5b. When the unit humidifier is stacked, by stacking while changing the length of the projection part 9a, the area of a gas passing through part from the supply/exhaust piping side 5a to the separator passage inlet outlet side 5b is made gradually small with advancing from the connection position of gas piping toward the stacking direction of the unit humidifier, and made gradually larger with furthermore advancing so that a minimum value exists from the connection position of air supply piping 12 toward the stacking direction of the unit humidifier.
COPYRIGHT: (C)2009,JPO&INPIT
Norihiko Kawabata
Takashi Morimoto
Toshihiro Matsumoto
Hiroyuki Nagai
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| JP2008186696A | ||||
| JP2001202977A |
Daisuke Nagano
Kentaro Fujii