Title:
HUMIDITY CONTROL DEVICE OF HERMETIC CHAMBER
Document Type and Number:
Japanese Patent JP2006142238
Kind Code:
A
Abstract:
To provide a humidity control device capable of corresponding to the humidity control in a wide range from low humidity to high humidity, without complicating a system.
This invention includes a box body 2 of a globe box 1 airtightly sectioned from the outside, and a humidity control device 20 disposed in this box body 2 in a communicable manner, and having a packed column 23 with an adsorbent inside thereof and a heater 24 for heating this adsorbent. In the device, a substituted gas is circulated between the box body 2 and the packed column 23, and the humidity in the box body 2 is controlled by adsorbing or discharging the water content to/from the adsorbent.
Inventors:
WADA SHIRO
Application Number:
JP2004337594A
Publication Date:
June 08, 2006
Filing Date:
November 22, 2004
Export Citation:
Assignee:
MIWA SEISAKUSHO KK
International Classes:
B01D53/26; B01L1/00; G21F7/015
Domestic Patent References:
JPH07163831A | 1995-06-27 | |||
JPH09206543A | 1997-08-12 | |||
JP2002045639A | 2002-02-12 | |||
JP2003286008A | 2003-10-07 |
Attorney, Agent or Firm:
Torii Hiroshi