ロードポートモジュールのウエハ容器の湿度低減装置及びそれを備えた半導体工程装置

Japanese Patent JP7411004

B2

The invention relates to a front opening unified pod dehumidification device of a load port module and a semiconductor process device thereof. The load port module is arranged in front of the front opening unified pod to form an insulating film at an entrance and exit port through which wafers enter and exit, thereby reducing the humidity of the front opening unified pod. The dehumidification device comprises: a main body disposed on the front upper portion of the front opening unified pod; a blower for blowing air to supply gas to the inside of the main body; and a jetting part for dispersing and discharging the gas injected into the main body downward to form a gas film. Therefore, in the invention, the main body, the blower, a partition wall, and the jetting part are disposed in front of the front opening unified pod in the load port module, so as to form a gas film at the entrance and exit port of the front opening unified pod, and further form an insulating gas film at the entrance and exit port of the front opening unified pod to block the inflow of outside air, thereby achieving the effect of reducing the humidity of the front opening unified pod.

JP2021187654	CONVEYANCE DEVICE AND CONVEYANCE METHOD
WO/2010/078264	METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
JP2017038072	CONVEYANCE HEAD OF FRAGILE MATERIAL SUBSTRATE

W Inkun
Park Jin Ho
Kim Jung Woo

JP2022071137A

January 10, 2024

April 22, 2022

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Justem Co., Ltd.

H01L21/677

JP2016050755A
JP2006128153A
JP2007180516A
JP2009038074A
JP2015023037A
JP2015026806A

KR1020210023653A
KR102226506B1
KR1020200031185A
US20200234988
US20180122676

TRY International Patent Attorney Corporation

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