PURPOSE: To eliminate the delay in time of the follow-up of temperature compensation by using a humidity detecting element and an element for temperature compensation having the same thermal characteristics with those of the former element as a pair.
CONSTITUTION: In the intermediate part of a U-shaped tantalum wire 32 is formed a tantalum oxide film 33 and on a part, at least, of this film 33 is formed a manganese dioxide layer 35 in such a manner that is contacts with and covers the film 33. On this layer 34, a steam-transmitting and electroconductive facing electrode 35, such as silver paint and carbon, and a solder layer 34 are formed and further one piece of the U-shaped device is coated with waterproof resin 37 such as silicone, whereby the humidity sensor using the humidity detecting element of a changing electrostatic capacity type is manufactured. In this case, a part between a drawn-out lead 39 and a common lead 38 has a temperature-humidity detecting function and the thermal characteristics of both leads are quite the same.
| JPS6181255 | WATER VOLUME RESPONSIVE WINDOW WIPER |
| WO/1990/005299 | DETECTION OF NON-METALLIC MATERIALS |
NISHINO ATSUSHI
FUJITO KATSUYUKI
INOGUCHI TAKEHIKO
| JPS5235690A | 1977-03-18 |