Title:
HYBRID RADIO FREQUENCY COMPONENT
Document Type and Number:
Japanese Patent JP2017103239
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a new hybrid radio frequency component and system.SOLUTION: A hybrid RF MEMS component method including electrostatic actuation and piezoelectric actuation includes: applying a first voltage to generate a first piezoelectric force to reduce a first gap 107 between a cantilever 101 and a working electrode 102; and applying a second voltage to generate an electrostatic force to create a contact between the cantilever and a transmission electrode.SELECTED DRAWING: Figure 1
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Inventors:
HSU HAO-HAN
RASHED MAHAMEED
MOHAMED A ABDELMONEUM
HAN DONG-HO
RASHED MAHAMEED
MOHAMED A ABDELMONEUM
HAN DONG-HO
Application Number:
JP2017001231A
Publication Date:
June 08, 2017
Filing Date:
January 06, 2017
Export Citation:
Assignee:
INTEL CORP
International Classes:
H01H57/00; B81B3/00; H01H59/00; H01L41/04; H01L41/09; H01L41/187; H01P1/10
Domestic Patent References:
| JP2015515763A | 2015-05-28 | |||
| JP2008027812A | 2008-02-07 | |||
| JP2008027812A | 2008-02-07 | |||
| JP2008238330A | 2008-10-09 | |||
| JP2006294591A | 2006-10-26 | |||
| JP2015515763A | 2015-05-28 | |||
| JP2008238330A | 2008-10-09 | |||
| JP2006294591A | 2006-10-26 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki