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Title:
Hybrid radio frequency component
Document Type and Number:
Japanese Patent JP6109854
Kind Code:
B2
Abstract:
Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric force to reduce a first gap between a cantilever and an actuation electrode, and applying a second voltage to generate an electrostatic force to create contact between the cantilever and a transmission electrode.

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Inventors:
Sue, Hao-han
Mahade, Rashed
Abdelmoneum, Mohammed A.
Han, Don-ho
Application Number:
JP2014554997A
Publication Date:
April 05, 2017
Filing Date:
June 26, 2013
Export Citation:
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Assignee:
Intel Corporation
International Classes:
H01P1/10; H01H57/00; H01H59/00
Domestic Patent References:
JP2008238330A
JP2007535863A
JP2011176038A
JP2005302711A
Foreign References:
WO2004061882A1
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki



 
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