Title:
ハイブリッド無線周波数コンポーネント
Document Type and Number:
Japanese Patent JP6382357
Kind Code:
B2
Abstract:
Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric force to reduce a first gap between a cantilever and an actuation electrode, and applying a second voltage to generate an electrostatic force to create contact between the cantilever and a transmission electrode.
Inventors:
Sue, Hao-han
Mahade, Rashed
Abdelmoneum, Mohammed A.
Han, Don-ho
Mahade, Rashed
Abdelmoneum, Mohammed A.
Han, Don-ho
Application Number:
JP2017001231A
Publication Date:
August 29, 2018
Filing Date:
January 06, 2017
Export Citation:
Assignee:
Intel Corporation
International Classes:
H01H57/00; B81B3/00; H01H59/00; H01L41/04; H01L41/09; H01L41/187; H01P1/10
Domestic Patent References:
| JP2008027812A | ||||
| JP2008238330A | ||||
| JP2006294591A | ||||
| JP2015515763A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki