Title:
HYPERBRANCHED POLYMER SYNTHESIS METHOD
Document Type and Number:
Japanese Patent JP2008179771
Kind Code:
A
Abstract:
To provide a hyperbranched polymer synthesis method capable of improving the long-term stability of the resolution performance of a hyperbranched polymer utilizable in a resist composition.
The method comprises forming a hyperbranched polymer by subjecting a monomer to living radical polymerization in the presence of a polar solvent, recovering the hyperbranched polymer by reprecipitation from the reaction solution containing the hyperbranched polymer, and passing a solution in which the recovered hyperbranched polymer is dissolved through a filter of an opening of 0.1 m or smaller.
Inventors:
KANEKO YUKIHIRO
UNO AKINORI
KUBO YOSHIYASU
TAMURA MINORU
UNO AKINORI
KUBO YOSHIYASU
TAMURA MINORU
Application Number:
JP2007286498A
Publication Date:
August 07, 2008
Filing Date:
November 02, 2007
Export Citation:
Assignee:
LION CORP
International Classes:
C08F6/06; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Akinori Sakai