Title:
HYPERFINE-GRAINED MATERIAL BLOWING FILM DEPOSITION METHOD
Document Type and Number:
Japanese Patent JP3338422
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a hyperfine-grained material blowing film deposition system by which a film sufficient in the joining of the hyperfine-grained material in the film, dense in the structure, smooth in the surface and uniform in density can be produced.
SOLUTION: In this hyperfine-grained material blowing film deposition method in which, by a deposited film obtained by feeding arid depositing a hyperfine- grained material on the surface of a substrate by blowing, the film of the hyperfine-grained material is deposited, at least a part of the flow of the blowing of the hyperfine-grained material is obliquely made incident on the surface of the substrate.
Inventors:
Akito Jun
Hironori Hatono
Masakatsu Kiyohara
Yuji Aso
Tatsuro Yokoyama
Katsuhiko Mori
Hironori Hatono
Masakatsu Kiyohara
Yuji Aso
Tatsuro Yokoyama
Katsuhiko Mori
Application Number:
JP2000205601A
Publication Date:
October 28, 2002
Filing Date:
July 06, 2000
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Akito Jun
Totou Equipment Co., Ltd.
Akito Jun
Totou Equipment Co., Ltd.
International Classes:
B05D3/04; B01J19/12; B05B13/02; B05D3/12; B05D7/24; B22F1/00; C23C24/04; C23C26/00; (IPC1-7): C23C24/04; B01J19/12; B05B13/02; B05D3/04; B05D3/12; B05D7/24; B22F1/00; C23C26/00
Domestic Patent References:
| JP438604A |
Attorney, Agent or Firm:
Haruo Kawai
Haruo Kawai
Haruo Kawai
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