Title:
【発明の名称】位置合わせ方法及びそれを用いた位置合わせ装置
Document Type and Number:
Japanese Patent JP3372633
Kind Code:
B2
Inventors:
Shigeo Kobayashi
Hiroki Suzukawa
Fumiei Hamasaki
Hiroki Suzukawa
Fumiei Hamasaki
Application Number:
JP3281494A
Publication Date:
February 04, 2003
Filing Date:
February 04, 1994
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F9/00; G05D3/12; H01L21/027; (IPC1-7): H01L21/027; G03F9/00; G05D3/12
Domestic Patent References:
| JP5283315A | ||||
| JP60242621A |
Attorney, Agent or Firm:
Yukio Takanashi