Title:
【発明の名称】物品熱処理装置
Document Type and Number:
Japanese Patent JP2820861
Kind Code:
B2
Inventors:
Tsutomu Hirata
Application Number:
JP14409593A
Publication Date:
November 05, 1998
Filing Date:
June 16, 1993
Export Citation:
Assignee:
Tabai Espec Co., Ltd.
International Classes:
B65G1/127; B65G47/52; F27B9/26; F27D3/12; G01R31/26; G01R31/28; G01R31/30; H01L21/324; H01L21/66; (IPC1-7): F27B9/26; B65G1/127; B65G47/52; F27D3/12; G01R31/26; G01R31/28; G01R31/30; H01L21/324; H01L21/66
Domestic Patent References:
| JP4279875A | ||||
| JP5203365A | ||||
| JP2276731A | ||||
| JP6352307B2 |
Attorney, Agent or Firm:
Tanigawa Masao