【発明の名称】ほう素拡散剤およびその製造方法

Title:

【発明の名称】ほう素拡散剤およびその製造方法

Document Type and Number:

Japanese Patent JP2575495

Kind Code:

B2

Inventors:

KAWADA ATSUO
KUBOTA YOSHIHIRO
HARADA KESAJI
ITO KENJI

Application Number:

JP13961789A

Publication Date:

January 22, 1997

Filing Date:

June 01, 1989

Export Citation:

Assignee:

SHINETSU CHEM IND CO

International Classes:

H01L21/225; C23C16/34; C23C16/38; H01L21/223; (IPC1-7): H01L21/223; C23C16/34; C23C16/38

Domestic Patent References:

JP5081777A

Attorney, Agent or Firm:

Ryoichi Yamamoto (1 person outside)

Previous Patent: タイヤ滑り止め装置の締付具

Next Patent: ワイヤハーネス等の保持具