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Title:
MECHANISM FOR DETECTING SUBSTRATE IN CASSETTE
Document Type and Number:
Japanese Patent JPH0722494
Kind Code:
A
Abstract:

PURPOSE: To easily carry in and out cassettes, surely detect the presence of a substrate without permitting the cassette to collide with the light projecting part or the light receiving part and eliminate the breakage of substrates due to colliding one another.

CONSTITUTION: Light projecting and receiving parts 2 and 3 which constitute a substrate presence detecting sensor are provided at the front and rear of a cassette 1 which contains substrates, and the light receiving part 3 or the light projecting part 2 is arranged on a lift mechanism 4.


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Inventors:
SUGIHARA MASARU
MURAMATSU FUMIO
TAKEDA TOMOHIKO
Application Number:
JP15936593A
Publication Date:
January 24, 1995
Filing Date:
June 29, 1993
Export Citation:
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Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
G01B11/00; H01L21/67; H01L21/68; (IPC1-7): H01L21/68; G01B11/00
Attorney, Agent or Firm:
Ishido



 
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