Title:
【発明の名称】コプラナリティ測定装置
Document Type and Number:
Japanese Patent JP2569883
Kind Code:
B2
Inventors:
Tomoyuki Kida
Application Number:
JP8663890A
Publication Date:
January 08, 1997
Filing Date:
March 31, 1990
Export Citation:
Assignee:
NEC
International Classes:
G01B11/02; H01L21/66; H01L23/50; (IPC1-7): H01L21/66; G01B11/02; H01L23/50
Domestic Patent References:
| JP2278102A |
Attorney, Agent or Firm:
Naotaka Ide