Title:
【発明の名称】差圧センサ、及び複合機能形差圧センサ
Document Type and Number:
Japanese Patent JP2595829
Kind Code:
B2
Abstract:
A multi-function differential pressure sensor includes a semiconductor chip, a stationary base having a joining portion joined to a thick wall portion of the semiconductor chip, and a housing joined to the stationary base. The semiconductor chip is provided with a differential pressure detection unit, a static pressure detection unit, and a temperature detection unit. The joining portion of the stationary base is not thicker than the semiconductor chip. The stationary base has one or more thin wall portions located, in a plan view, within a circular pressure sensitive diaphragm of the semiconductor chip.
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Inventors:
Tomoyuki Tobita
Yoshimi Yamamoto
Nagasu Akira
Ken Aoki
Yoshimi Yamamoto
Nagasu Akira
Ken Aoki
Application Number:
JP9028991A
Publication Date:
April 02, 1997
Filing Date:
April 22, 1991
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01L9/00; G01L13/06; G01L19/00; G01L9/04; G01L19/02; G01L19/04; (IPC1-7): G01L9/04; G01L13/06
Domestic Patent References:
| JP264430A | ||||
| JP5242387A | ||||
| JP344079A | ||||
| JP5543819A |
Attorney, Agent or Firm:
Ogawa Katsuo