Title:
【発明の名称】ラジカル反応による無歪精密数値制御加工方法及びその装置
Document Type and Number:
Japanese Patent JP2962583
Kind Code:
B2
Inventors:
MORI JUZO
Application Number:
JP2789491A
Publication Date:
October 12, 1999
Filing Date:
January 28, 1991
Export Citation:
Assignee:
YUUHA MIKAKUTO SEIMITSU KOGAKU KENKYUSHO KK
MORI JUZO
MORI JUZO
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23F4/00; H01L21/3065
Domestic Patent References:
| JP1125829A |
Other References:
【文献】米国特許4668366(US,A)
【文献】”SPIE”Vol.966 Adsrances in Fabrication and Metrology for Optics and Large Optics(1988)PP.82~90
【文献】”SPIE”Vol.1333 Advanced Optical Manufacturing and Tasting(1990)pp.44~57
【文献】”SPIE”Vol.966 Adsrances in Fabrication and Metrology for Optics and Large Optics(1988)PP.82~90
【文献】”SPIE”Vol.1333 Advanced Optical Manufacturing and Tasting(1990)pp.44~57
Attorney, Agent or Firm:
Takao Yanagino