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Patent Searching and Data


Title:
ELECTRIC FIELD DETECTOR
Document Type and Number:
Japanese Patent JPH0755849
Kind Code:
A
Abstract:

PURPOSE: To measure the voltage of an electrode on a circuit board, to be measured, stably without resonance even at a high frequency in an apparatus wherein an electro-optical element whose optical characteristic is changed when an electric field is applied is arranged close to the circuit board and a change in the optical characteristic is measured by an optical beam.

CONSTITUTION: An auxiliary electrode 5 is installed on the surface of an electro- optical element 1, and it is connected to a reference electrode 4 on a circuit board 2, to be measured, via conductive enclosures 6, 8 installed so as to surround the electro-optical element 1. Consequently, since a voltage across an electrode as a measuring object and the reference electrode 4 is applied effectively to the electro-optical element 1, the high sensitivity of the title detection apparatus can be obtained, and the voltage of the electrode with reference to a reference voltage can be measured irrespective of the geometrical arrangement of the electrode. In addition, since a resonant frequency can be made large, a measurable frequency band can be expanded. In addition, the influence of an external electric field can be eliminated.


Inventors:
MIZUTA YOSHIYA
SUGIYAMA SUNAO
Application Number:
JP19855293A
Publication Date:
March 03, 1995
Filing Date:
August 10, 1993
Export Citation:
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Assignee:
TARA TEC KK
International Classes:
G01R29/08; G01R31/302; H01L21/66; G01R19/00; (IPC1-7): G01R19/00; G01R29/08; G01R31/302; H01L21/66
Attorney, Agent or Firm:
Naotaka Ide