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Patent Searching and Data


Title:
【発明の名称】電子ビーム描画装置
Document Type and Number:
Japanese Patent JP2960413
Kind Code:
B1
Inventors:
TAKAMATSU JUN
OGASAWARA MUNEHIRO
Application Number:
JP29701998A
Publication Date:
October 06, 1999
Filing Date:
October 19, 1998
Export Citation:
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Assignee:
TOSHIBA KK
International Classes:
H01J37/305; G03F7/20; H01L21/027; (IPC1-7): H01J37/305; H01L21/027
Domestic Patent References:
JP11154640A
JP4890680A
JP1092370A
JP6119126A
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)