Title:
【発明の名称】電子ビーム描画装置
Document Type and Number:
Japanese Patent JP2960413
Kind Code:
B1
Inventors:
TAKAMATSU JUN
OGASAWARA MUNEHIRO
OGASAWARA MUNEHIRO
Application Number:
JP29701998A
Publication Date:
October 06, 1999
Filing Date:
October 19, 1998
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
H01J37/305; G03F7/20; H01L21/027; (IPC1-7): H01J37/305; H01L21/027
Domestic Patent References:
| JP11154640A | ||||
| JP4890680A | ||||
| JP1092370A | ||||
| JP6119126A |
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)