【発明の名称】膜厚制御方法 - NIPPON SHEET GLASS COMPANY,LIMITED

Title:

【発明の名称】膜厚制御方法

Document Type and Number:

Japanese Patent JPH0798993

Kind Code:

B2

Inventors:

Yoshiyuki Hanada
Etsuo Ogino
Enjoji Katsuhisa
Kazuhiko Fujimaki

Application Number:

JP17309086A

Publication Date:

October 25, 1995

Filing Date:

July 23, 1986

Export Citation:

Assignee:

NIPPON SHEET GLASS COMPANY,LIMITED

International Classes:

G05B21/02; C23C14/54; H01L21/203; H01L21/66; (IPC1-7): C23C14/54

Attorney, Agent or Firm:

Ohno Seiichi

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