Title:
【発明の名称】流液式スクラバ洗浄方法及び装置
Document Type and Number:
Japanese Patent JP3131149
Kind Code:
B2
Abstract:
Method for scrubbing flat disc-like work pieces in a running wash liquid, by the use of a wash liquid flow vessel 2 maintaining a continuous flow of a wash liquid in one direction, a work carrier 18 for holding a plural number of work pieces 4 in an immersed state and in parallel relation with the flow direction of the wash liquid, a slidable carriage 28 for transferring the work carrier 18 in a direction reverse to the flow direction of the wash liquid, and a scrubber means 20 having scrubbing brushes 38 for washing and scrubbing the work pieces 4 on the carrier 18 in an immersed state in the flow of the wash liquid.
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Inventors:
Yoshinobu Terui
Application Number:
JP13964596A
Publication Date:
January 31, 2001
Filing Date:
May 09, 1996
Export Citation:
Assignee:
Speed Fam Clean System Co., Ltd.
International Classes:
B08B1/02; B08B3/04; B08B3/10; B08B7/04; B08B1/04; H01L21/00; (IPC1-7): B08B7/04; B08B1/04; B08B3/04
Domestic Patent References:
| JP1289122A | ||||
| JP4187279A | ||||
| JP63152694U |
Attorney, Agent or Firm:
Hiroshi Hayashi (1 person outside)