Title:
【発明の名称】熱処理方法および熱処理装置
Document Type and Number:
Japanese Patent JP3354996
Kind Code:
B2
Inventors:
Kenji Shinozaki
Masayuki Tomita
Masayuki Tomita
Application Number:
JP19972593A
Publication Date:
December 09, 2002
Filing Date:
August 11, 1993
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H01L21/205; H01L21/22; H01L21/31; H01L21/324; (IPC1-7): H01L21/205; H01L21/22; H01L21/324
Domestic Patent References:
| JP63216283A | ||||
| JP5681931A | ||||
| JP5681933A | ||||
| JP5291143A | ||||
| JP737828A | ||||
| JP4142742A | ||||
| JP328376A |
Attorney, Agent or Firm:
Hisako Ishido (1 person outside)