Title:
【発明の名称】撮像対象領域位置決め撮像装置、検査装置、形状計測装置、及び製品製造方法
Document Type and Number:
Japanese Patent JP3361682
Kind Code:
B2
Abstract:
PURPOSE: To provide an image-pickup-region positioning and image-picking-up apparatus by which an image-pickup region is positioned without moving an object and an image pickup device and at high speed. CONSTITUTION: The image-pickup-region positioning and image-picking-up apparatus is provided with a plane mirror Mϕwhich receives a luminous flux coming from an object P and deflects it, a plane mirror Mθ whose axis of rotation is perpendicular, in terms of projection, to that of the plane mirror Mϕ and which deflects a luminous flux from the plane mirror Mϕ , and an optical-system lens L which receives a luminous flux from the plane mirror Mθ , which decides an imaging magnification and by which the image P' of the object is formed on an image pickup element I. The plane mirrors Mϕ , Mθ are moved independently of each other in mechanism around their axis of rotation by means of a stepping motor, the luminous fluxes are deflected, and the object P in a selected object region and positioned is image-picked up by the image-picking up element I.
Inventors:
Shigeki Kobayashi
Hiro Kiji
Atsushi Hayashi
Hiro Kiji
Atsushi Hayashi
Application Number:
JP2072896A
Publication Date:
January 07, 2003
Filing Date:
February 07, 1996
Export Citation:
Assignee:
Shigeki Kobayashi
Hiro Kiji
Atsushi Hayashi
Hiro Kiji
Atsushi Hayashi
International Classes:
G01B11/00; G01B11/24; G01N21/88; G06T1/00; G06T7/00; H04N7/18; H05K13/04; (IPC1-7): G01B11/00; G01B11/24; G01N21/88; G06T1/00; G06T7/00; H04N7/18; H05K13/04
Domestic Patent References:
| JP63167981A | ||||
| JP62180252A | ||||
| JP583712A |
Attorney, Agent or Firm:
Shigenobu Nakamura