【発明の名称】絶縁膜の形成方法

Title:

【発明の名称】絶縁膜の形成方法

Document Type and Number:

Japanese Patent JP2742381

Kind Code:

B2

Inventors:

Hideo Izawa
Kimitani Wataya
Hiroshi Morimoto

Application Number:

JP2705194A

Publication Date:

April 22, 1998

Filing Date:

February 24, 1994

Export Citation:

Click for automatic bibliography generation Help

Assignee:

GTC Inc.

International Classes:

C23C16/34; C23C16/50; H01L21/31; H01L21/316; H01L21/318; H01L21/336; H01L29/786; (IPC1-7): H01L29/786; H01L21/31; H01L21/316; H01L21/318; H01L21/336

Domestic Patent References:

JP4110471A
JP6353929A
JP1296626A

Other References:

シャープ技報Ｎｏ．５５（１９９３−３−１０）ｐ．２７−３１

Attorney, Agent or Firm:

Masatake Shiga (2 outside)

Previous Patent: フィルタプレスの圧搾膜及び該圧搾膜を用いる圧搾濾板

Next Patent: ポリアセタール樹脂組成物