Title:
【発明の名称】電解イオン水生成方法
Document Type and Number:
Japanese Patent JP3382101
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrolytic ion water making method utilizing an electrolytic ion water making apparatus capable of reducing running cost in a washing process, preventing the environmental pollution caused by waste water and enhancing the safety of work environment. SOLUTION: An electrolyte soln. 8 having a support electrolyte composed of highly conc. hydrochloric acid is electrolyzed by using an electrolytic ion water making apparatus 1 having carbon electrodes 4, 5reduced in the omission of a carbon piece to form electrolytic ion water free from metal contamination. The electrolyte soln. 8 contains hydrochloric acid as a support electrolyte in a high concn. of 1,000-100,000ppm.
Inventors:
Atsushi Takayasu
Naoto Miyashita
Naoto Miyashita
Application Number:
JP27735496A
Publication Date:
March 04, 2003
Filing Date:
September 28, 1996
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C02F1/46; C25B9/17; C25B9/19; H01L21/304; (IPC1-7): C02F1/46; C25B9/00; C25B11/12
Domestic Patent References:
| JP7263430A | ||||
| JP8126886A | ||||
| JP55149684A |
Attorney, Agent or Firm:
Hisashi Takemura