Title:
【発明の名称】高純度コバルトの製造方法及び高純度コバルトスパッタリングターゲット
Document Type and Number:
Japanese Patent JP3065242
Kind Code:
B2
Inventors:
Yuichiro Shindo
Tsuneo Suzuki
Tsuneo Suzuki
Application Number:
JP6036296A
Publication Date:
July 17, 2000
Filing Date:
February 23, 1996
Export Citation:
Assignee:
Japan Energy Co., Ltd.
International Classes:
C22B23/06; C23C14/14; C23C14/34; C25C1/08; H01L21/3205; H01L23/52; (IPC1-7): C22B23/06; C23C14/14; C23C14/34; C25C1/08
Domestic Patent References:
| JP4941217A | ||||
| JP62228436A | ||||
| JP518095B1 |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)