Title:
【発明の名称】チタン酸鉛薄膜の製造方法
Document Type and Number:
Japanese Patent JPH0637329
Kind Code:
B2
Abstract:
PURPOSE:To prepare a lead titanate thin film within a short period by mixing a lead alkoxide with a titanium alkoxide, spraying the mixture on a heated substrate and subsequently thermally treating the substrate. CONSTITUTION:A mixture solution obtained by mixing a lead alkoxide (e.g. lead diisopropoxide) with a titanium alkoxide (e.g. titanium tetraisopropoxide) in a Pb:Ti molar ratio of 1:1 is sprayed on a heated substrate to form an amorphous pyroelectric material thin film thereon, followed by drying and calcining the formed film at 600-1200 deg.C for 10min in the atmosphere.
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Inventors:
Minoru Saga
Toshio Kanno
Toshio Kanno
Application Number:
JP14724990A
Publication Date:
May 18, 1994
Filing Date:
June 07, 1990
Export Citation:
Assignee:
Director General, Technical Research Division, Defense Agency
International Classes:
G01J1/02; C04B35/46; G01J5/02; G01J5/34; H01L21/368; H01L37/00; (IPC1-7): C04B35/46; H01L21/368
Attorney, Agent or Firm:
Takashi Murai